US 12,493,179 B2
Micromechanical oscillation system
Helmut Grutzeck, Kusterdingen (DE); Frank Schatz, Kornwestheim (DE); Johannes Baader, Haslach (DE); Josip Mihaljevic, Holzgerlingen (DE); and Timo Schary, Aichtal-Neuenhaus (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Dec. 22, 2021, as Appl. No. 17/645,541.
Claims priority of application No. 10 2021 200 018.5 (DE), filed on Jan. 5, 2021.
Prior Publication US 2022/0214536 A1, Jul. 7, 2022
Int. Cl. G02B 26/08 (2006.01); G03B 21/00 (2006.01); H01F 7/08 (2006.01)
CPC G02B 26/085 (2013.01) [G03B 21/008 (2013.01); H01F 7/081 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A micromechanical oscillation system, comprising:
a micromechanical oscillating body having at least one micromirror; and
an electromagnetic drive unit including a coil body and at least two magnets, the coil body extending completely laterally to the micromirror, the coil body extending laterally in a top view in a direction of an axis of symmetry of the micromirror, and the at least two magnets extending underneath the coil body, the at least two magnets extending underneath in the top view in the direction of the axis of symmetry of the micromirror,
wherein the at least two magnets are situated at a distance from each other, and at least one first and one second magnetic flux guide for conducting the magnetic field lines in a direction of the coil body are situated between the at least two magnets,
wherein the at least one first and one second magnetic flux guides are curved and at least partially shield the at least two magnets from an external environment.