US 12,493,140 B2
Micro-sized metamaterial absorbers
Vladimir P. Raksha, Santa Rosa, CA (US); and Paul T. Kohlmann, Windsor, CA (US)
Assigned to VIAVI Solutions Inc., San Jose, CA (US)
Filed by VIAVI Solutions Inc., San Jose, CA (US)
Filed on Feb. 23, 2022, as Appl. No. 17/652,202.
Claims priority of provisional application 63/157,493, filed on Mar. 5, 2021.
Prior Publication US 2022/0283341 A1, Sep. 8, 2022
Int. Cl. G02B 5/00 (2006.01); G02B 1/00 (2006.01)
CPC G02B 5/003 (2013.01) [G02B 1/002 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A metamaterial absorber (MMA) to absorb a particular range of electromagnetic radiation, comprising:
a first metal or semiconductor material,
wherein the first metal or semiconductor material is a resistive material that comprises a silicon material;
a dielectric material disposed on the first metal or semiconductor material,
wherein the dielectric material comprises a magnesium fluoride material; and
a second metal material disposed on the dielectric material, wherein:
the second metal material is different from the first metal or semiconductor material,
the second metal material is a magnetic metal material,
a length dimension associated with the MMA is less than or equal to 200 micrometers (μm),
a width dimension associated with the MMA is less than or equal to 200 μm, a thickness dimension associated with the MMA is less than or equal to 8 μm,
a profile of the MMA comprises:
a C-shaped profile,
an H-shaped profile, or
a U-shaped profile, and
the particular range of electromagnetic radiation is between 300 micrometers (μm) and 10 centimeters (cm).