US 12,492,960 B2
Vacuum leak detection system, gas control unit and method for gas leak detection
Daniel Wetzig, Cologne (DE); Maximilian Reismann, Cologne (DE); Josef Grenz, Cologne (DE); and Hendrik Van Triest, Cologne (DE)
Assigned to INFICON GmbH, Cologne (DE)
Appl. No. 18/016,830
Filed by INFICON GmbH, Cologne (DE)
PCT Filed Jul. 15, 2021, PCT No. PCT/EP2021/069759
§ 371(c)(1), (2) Date Jan. 18, 2023,
PCT Pub. No. WO2022/017907, PCT Pub. Date Jan. 27, 2022.
Claims priority of application No. 102020119600.8 (DE), filed on Jul. 24, 2020.
Prior Publication US 2023/0273087 A1, Aug. 31, 2023
Int. Cl. G01M 3/20 (2006.01)
CPC G01M 3/202 (2013.01) 28 Claims
OG exemplary drawing
 
1. A vacuum-leak detection system comprising:
a test chamber unit having a test chamber gas inlet and a test chamber gas outlet;
a gas detection unit having a gas detection gas inlet and a gas detection gas outlet; and
a gas control unit connected between the test chamber unit and the gas detection unit, the gas control unit having a plurality of gas inlets, a plurality of gas outlets and a plurality of gas conduction paths for selectively connecting the plurality of gas inlets and the plurality of gas outlets:
wherein the plurality of gas inlets includes a first gas inlet connected to the test chamber gas outlet, a second gas inlet connected to the gas detection gas outlet and a third gas inlet which is open towards the atmosphere;
wherein the plurality of gas outlets includes a first gas outlet connected to the test chamber gas inlet, a second gas outlet connected to the gas detection gas inlet and a third gas outlet;
wherein the plurality of gas conduction paths include a carrier gas conduction path that connects the third gas inlet to the first gas outlet in order to supply carrier gas to the test chamber unit via the test chamber gas inlet.