US 12,492,938 B2
Hybrid reflective microscope objective
Yan Min, Verona, WI (US); and Francis J Deck, Madison, WI (US)
Assigned to Thermo Electron Scientific Instruments LLC, Madison, WI (US)
Filed by Thermo Electron Scientific Instruments LLC, Madison, WI (US)
Filed on Nov. 7, 2022, as Appl. No. 18/053,018.
Claims priority of provisional application 63/284,362, filed on Nov. 30, 2021.
Prior Publication US 2023/0168122 A1, Jun. 1, 2023
Int. Cl. G01J 3/02 (2006.01); G02B 21/04 (2006.01)
CPC G01J 3/0208 (2013.01) [G02B 21/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An objective lens system, comprising:
a primary aspheric mirror having a first R-value; and
a secondary aspheric mirror having a second R-value smaller than the first R-value, wherein the primary and secondary aspheric mirrors form a Schwarzchild structure having a working distance of at least 20 mm and a numerical aperture of 0.29-0.65, and wherein surfaces of the primary and secondary aspheric mirrors are defined by a series of aspheric parameters including a non-zero sixth order aspheric parameter.