US 12,492,340 B2
Etchant
Shinhyuk Yang, Yongin-si (KR); Beomsoo Kim, Iksan-si (KR); Hyeonsu Cho, Iksan-si (KR); Jeehoon Kim, Yongin-si (KR); Youngjin Yoon, Iksan-si (KR); Eunwon Lee, Iksan-si (KR); Donghan Kang, Yongin-si (KR); Jihun Park, Yongin-si (KR); and Jongmoo Huh, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR); and DONGWOO FINE-CHEM Co., Ltd., Iksan-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR); and DONGWOO FINE-CHEM Co., Ltd., Iksan-si (KR)
Filed on Mar. 7, 2023, as Appl. No. 18/179,919.
Claims priority of application No. 10-2022-0034934 (KR), filed on Mar. 21, 2022.
Prior Publication US 2023/0295504 A1, Sep. 21, 2023
Int. Cl. C09K 13/08 (2006.01)
CPC C09K 13/08 (2013.01) 20 Claims
OG exemplary drawing
 
1. An etchant comprising:
persulfate;
a fluorine-containing compound;
a chlorine-containing compound; a cyclic amine compound;
an inorganic acid;
a first compound; and water,
wherein the first compound is a compound comprising:
a sulfonic group, a sulfonic acid group, or a combination thereof; and
an amine group, and
an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by <Equation 1>:
Y=1.4×10−4×M(X1)+1.3×10−4×M(X2)+1.45×10−3×M(X3)+1.5×10−5×M(X1)×M(X2)+1.6×10−3×M(X1)×M(X3)+6.5×10−4×M(X2)×M(X3),  Equation 1
wherein, in Equation 1,
M(X1) indicates wt % of the first compound with respect to 100 wt % in total of the etchant,
M(X2) indicates wt % of the chlorine-containing compound with respect to 100 wt % in total of the etchant, and
M(X3) indicates wt % of the water with respect to 100 wt % in total of the etchant.