US 11,837,931 B2
Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
Maarten Hartger Kimman, Veldhoven (NL); Dave Braaksma, Veldhoven (NL); Peter Michel Silvester Maria Heijmans, Weert (NL); and Christiaan Alexander Hoogendam, Westerhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Mar. 9, 2022, as Appl. No. 17/690,203.
Application 17/690,203 is a division of application No. 16/073,258, granted, now 11,303,175, previously published as PCT/EP2017/050199, filed on Jan. 5, 2017.
Claims priority of application No. 16155377 (EP), filed on Feb. 12, 2016; and application No. 16167411 (EP), filed on Apr. 28, 2016.
Prior Publication US 2022/0200385 A1, Jun. 23, 2022
Int. Cl. H02K 3/28 (2006.01); H02K 41/03 (2006.01); G03F 7/00 (2006.01); H02K 29/03 (2006.01); H02K 7/09 (2006.01)
CPC H02K 3/28 (2013.01) [G03F 7/70758 (2013.01); H02K 41/031 (2013.01); H02K 7/09 (2013.01); H02K 29/03 (2013.01); H02K 2201/18 (2013.01); H02K 2213/03 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electromagnetic motor comprising:
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a first magnetic pitch in a first direction and a second magnetic pitch in a second direction; and
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a plurality of first coil sets, each first coil set comprising a plurality of first coils for generating the first force and a plurality of second coil sets, each second coil set comprising a plurality of second coils for generating the second force, wherein at least one first coil set has a different coil pitch from another first coil set, and wherein a ratio R1 of a first coil pitch in the first coil set in the first direction over the first magnetic pitch is different from a ratio R2 of a second coil pitch in the second coil set in the second direction over the second magnetic pitch.