CPC H01L 25/0657 (2013.01) [H01L 21/76898 (2013.01); H01L 23/5384 (2013.01); H01L 23/5385 (2013.01); H01L 23/5386 (2013.01); H01L 24/95 (2013.01)] | 33 Claims |
1. A microelectronic assembly comprising:
a substrate;
a first die and a first bonding layer on the first die, the first bonding layer directly bonded to the substrate without an adhesive;
a second die having a microelectronic circuit element formed therein and disposed over the first die, the first die directly bonded to a second bonding layer on the second die without an adhesive;
a first encapsulating layer disposed adjacent a side wall of the second die; and
a second encapsulating layer deposited on and laterally adjacent the first encapsulating layer, the second encapsulating layer comprising an inorganic material.
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