US 11,837,437 B2
Specimen machining device and information provision method
Tatsuhito Kimura, Tokyo (JP); Munehiro Kozuka, Tokyo (JP); Tsutomu Negishi, Tokyo (JP); and Hisashi Kawahara, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Jun. 3, 2022, as Appl. No. 17/832,001.
Claims priority of application No. 2021-094685 (JP), filed on Jun. 4, 2021.
Prior Publication US 2022/0392744 A1, Dec. 8, 2022
Int. Cl. H01J 37/304 (2006.01); H01J 37/08 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01)
CPC H01J 37/304 (2013.01) [H01J 37/08 (2013.01); H01J 37/20 (2013.01); H01J 37/222 (2013.01); H01J 2237/002 (2013.01); H01J 2237/026 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/30405 (2013.01); H01J 2237/30472 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A specimen machining device for machining a specimen by irradiating the specimen with an ion beam, the specimen machining device comprising:
an ion source for irradiating the specimen with the ion beam;
a specimen stage for holding the specimen;
a camera for photographing the specimen;
an information provision unit for providing information indicating an expected machining completion time; and
a storage unit for storing past machining information,
the information provision unit configured to perform:
processing for calculating the expected machining completion time based on the past machining information;
processing for acquiring an image photographed by the camera;
processing for calculating a machining speed based on the acquired image; and
processing for updating the expected machining completion time based on the machining speed.