US 11,835,870 B2
Temperature conditioning system
Güneş Nakiboğlu, Eindhoven (NL); Nicholas Peter Waterson, Veldhoven (NL); Remco Van De Meerendonk, 's-Hertogenbosch (NL); Steve Gregory Brust, Eindhoven (NL); Dirk Martinus Gerardus Petrus Wilhelmus Jakobs, Vortum-Mullem (NL); and Shravan Kottapalli, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/627,720
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jun. 18, 2020, PCT No. PCT/EP2020/066871
§ 371(c)(1), (2) Date Jan. 17, 2022,
PCT Pub. No. WO2021/013441, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 19187169 (EP), filed on Jul. 19, 2019; and application No. 19212462 (EP), filed on Nov. 29, 2019.
Prior Publication US 2022/0350265 A1, Nov. 3, 2022
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70891 (2013.01) 20 Claims
OG exemplary drawing
 
1. A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within an apparatus, the reduction system comprising:
a conduit that provides a flow path for a liquid through the reduction system;
a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit;
a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that, in use, compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and
an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.