US 11,835,867 B2
Measuring device and measuring method
Masakazu Hamasaki, Mie Mie (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by KIOXIA CORPORATION, Tokyo (JP)
Filed on Aug. 24, 2022, as Appl. No. 17/894,783.
Claims priority of application No. 2022-043802 (JP), filed on Mar. 18, 2022.
Prior Publication US 2023/0296991 A1, Sep. 21, 2023
Int. Cl. G03F 9/00 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70683 (2013.01) [G03F 9/7046 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A measuring device comprising:
a support body configured to support an end portion of a measurement target;
a first light source disposed on a front surface side of the support body;
a second light source disposed on a rear surface side of the support body and having an optical axis coinciding with an optical axis of the first light source;
a first sensor configured to acquire an image of a mark in the measurement target in accordance with light from the first light source;
a second sensor configured to acquire an image of the mark in the measurement target in accordance with light from the second light source; and
a controller comparing a sensing result of the first sensor with a sensing result of the second sensor and determining, according to a result of the comparing, which of the sensing result of the first sensor or the sensing result of the second sensor is to be used in performing a measurement.