US 11,835,713 B2
Optical scanning apparatus, three-dimensional measurement apparatus, and robot system
Kei Kamakura, Suwa-Gun Hara-Mura (JP); Hirokazu Yamaga, Chino (JP); and Takeshi Shimizu, Chino (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 4, 2020, as Appl. No. 17/111,518.
Claims priority of application No. 2019-221054 (JP), filed on Dec. 6, 2019.
Prior Publication US 2021/0173200 A1, Jun. 10, 2021
Int. Cl. G06F 17/00 (2019.01); G02B 26/10 (2006.01); G05D 1/02 (2020.01); G02B 26/08 (2006.01)
CPC G02B 26/105 (2013.01) [G02B 26/0833 (2013.01); G05D 1/0251 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An optical scanning apparatus that projects patterned light formed of laser light, the optical scanning apparatus comprising:
a MEMS substrate including a mirror that swings around a swing axis;
a substrate fixing section to which the MEMS substrate is fixed; and
an environment detection sensor that detects an environment factor associated with the mirror,
wherein the environment detection sensor is disposed in a position where the environment detection sensor overlaps with or is adjacent to the substrate fixing section but does not overlap with the MEMS substrate in a plan view viewed in a direction perpendicular to a surface of the MEMS substrate.