US 11,835,708 B2
Laser crystallization apparatus
Dong Eon Lim, Cheonan-si (KR); Jeong Un Go, Cheonan-si (KR); Hyun Jin Kim, Ansan-si (KR); Hoon Chul Ryoo, Cheonan-si (KR); Yeong Jin Seol, Cheonan-si (KR); Gil Yong On, Anyang-si (KR); Yeon Hak Lee, Anyang-si (KR); and Hye Ji Cho, Anyang-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Apr. 28, 2021, as Appl. No. 17/242,405.
Claims priority of application No. 10-2020-0053130 (KR), filed on May 4, 2020.
Prior Publication US 2021/0341727 A1, Nov. 4, 2021
Int. Cl. G02B 26/02 (2006.01); H01L 27/12 (2006.01); G02B 27/14 (2006.01); G02B 19/00 (2006.01)
CPC G02B 26/023 (2013.01) [G02B 19/0014 (2013.01); G02B 27/144 (2013.01); H01L 27/1285 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A laser crystallization apparatus, comprising:
a plurality of laser generators which generate a plurality of laser beams, the plurality of laser generators including first and second laser generators which respectively generate laser beams;
a plurality of attenuators which adjust energy intensity of the plurality of laser beams, the plurality of attenuators including:
a first attenuator which attenuates the energy intensity of the laser beam directly received from the first laser generator; and
a second attenuator which maintains the energy intensity of the laser beam directly received from the second laser generator; and
an optical module which overlaps outputs of the plurality of attenuators and outputs a line beam,
wherein the energy intensity of the corresponding laser beam directly received from the first laser generator to the first attenuator and the energy intensity of the corresponding laser beam directly received from the second laser generator to the second attenuator are identical to each other.