| CPC G01N 21/9501 (2013.01) [G06T 7/11 (2017.01); G01N 2021/8864 (2013.01); G06T 2207/30148 (2013.01)] | 11 Claims |
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1. A detection apparatus for detecting a mark formed on a substrate, the detection apparatus comprising:
a stage that moves while holding the substrate;
a detection optical system that irradiates light on the mark on the substrate held by the stage and detects an image of the mark; and
a processor that performs a detection process of the mark based on the image of the mark detected by the detection optical system, wherein the processor is configured to:
find a detection value indicating a position of the mark in an observation field of the detection optical system based on the image of the mark detected by the detection optical system;
find a subregion where the mark is located among a plurality of subregions in the observation field; and
correct the detection value based on a correction value corresponding to the found subregion among correction values predetermined for the plurality of subregions, respectively,
wherein, in a state where the mark is located across two or more subregions, the processor is configured to:
find a first subregion that is a subregion where a center of the mark exists;
find a corrected correction value by taking a weighted average of the correction values each predetermined for each of the two or more subregions using weights depending upon an amount of positional shift between the center of the mark and a center of the first subregion; and
correct the detection value using the corrected correction value.
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