US 11,835,465 B2
Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components
Yoshifumi Ogawa, Tokyo (JP); Yutaka Kouzuma, Tokyo (JP); and Masaru Izawa, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 16/646,487
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Feb. 15, 2019, PCT No. PCT/JP2019/005467
§ 371(c)(1), (2) Date Mar. 11, 2020,
PCT Pub. No. WO2020/166048, PCT Pub. Date Aug. 20, 2020.
Prior Publication US 2021/0231571 A1, Jul. 29, 2021
Int. Cl. G01N 21/73 (2006.01); C23C 16/52 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H05H 1/24 (2006.01); H01L 21/66 (2006.01)
CPC G01N 21/73 (2013.01) [C23C 16/52 (2013.01); H01J 37/32 (2013.01); H01J 37/32834 (2013.01); H01L 21/67253 (2013.01); H05H 1/24 (2013.01); H01J 2237/24592 (2013.01); H01L 21/67069 (2013.01); H01L 22/26 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A detecting method of gas components for detecting, using a detecting device of gas components, components of a gas to be analyzed that is exhausted from a processing apparatus and flows through an exhaust pipe portion, wherein the detecting device of gas components includes a nozzle portion, a hole that passes through the nozzle portion, a light emission detecting unit disposed at an opposite end portion of the hole with respect to one end of the hole in the nozzle portion, and an introduced gas supply portion disposed between the light emission detecting unit and the nozzle portion, the detecting method of gas components comprising:
introducing an introduced gas, into an inside of the hole that passes through the nozzle portion of the detecting device of gas components, from the introduced gas supply portion of the detecting device of gas components;
introducing a part of the gas to be analyzed that flows through the exhaust pipe portion into the inside of the hole from an opening provided in an intermediate portion of the hole between said one end of the hole in the nozzle portion and the introduced gas supply portion;
generating a plasma, using the gas to be analyzed and the introduced gas, by a discharge electrode of the detecting device of gas components discharging in a region including a section where the gas to be analyzed is introduced from the opening and the inside of the hole of the nozzle portion;
detecting a light emission of the generated plasma passing through the hole of the nozzle portion by the light emission detecting unit of the detecting device of gas components; and
detecting the components of the gas to be analyzed based on information of the light emission of the plasma that is detected by the light emission detecting unit.