US 11,835,388 B2
Light detection device
Masaki Hirose, Hamamatsu (JP); Katsumi Shibayama, Hamamatsu (JP); Takashi Kasahara, Hamamatsu (JP); Toshimitsu Kawai, Hamamatsu (JP); Hiroki Oyama, Hamamatsu (JP); and Yumi Teramachi, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Apr. 8, 2020, as Appl. No. 16/843,244.
Application 16/843,244 is a division of application No. 15/764,943, granted, now 10,656,020, previously published as PCT/JP2016/078476, filed on Sep. 27, 2016.
Claims priority of application No. 2015-196516 (JP), filed on Oct. 2, 2015; and application No. 2016-109495 (JP), filed on May 31, 2016.
Prior Publication US 2020/0232852 A1, Jul. 23, 2020
Int. Cl. G01J 5/08 (2022.01); G01J 3/26 (2006.01); G02B 26/00 (2006.01); G01J 3/02 (2006.01); G01J 5/0802 (2022.01); G01J 5/20 (2006.01); G02F 1/21 (2006.01); H01L 31/02 (2006.01); H01L 31/0203 (2014.01); H01L 31/0232 (2014.01); H01L 31/0304 (2006.01); G01J 5/04 (2006.01); H10N 15/10 (2023.01)
CPC G01J 3/26 (2013.01) [G01J 3/0213 (2013.01); G01J 3/0256 (2013.01); G01J 3/0291 (2013.01); G01J 5/0802 (2022.01); G01J 5/20 (2013.01); G02B 26/00 (2013.01); G02F 1/21 (2013.01); H01L 31/0203 (2013.01); H01L 31/02005 (2013.01); H01L 31/02327 (2013.01); H01L 31/03046 (2013.01); G01J 5/045 (2013.01); G02F 1/213 (2021.01); H10N 15/10 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A light detection device, comprising:
a Fabry-Perot interference filter having a first mirror and a second mirror, a distance there between is variable, and provided with a light transmission region on a predetermined line, the light transmission region configured to transmit light corresponding to the distance between the first mirror and the second mirror;
a light detector arranged on a first side of the Fabry-Perot interference filter on the line, the light detector configured to detect light transmitted through the light transmission region;
a package having an opening positioned on a second side of the Fabry-Perot interference filter on the line, the package configured to accommodate the Fabry-Perot interference filter and the light detector; and
a light transmitting unit arranged on an inner surface of the package so as to close the opening and including a band pass filter configured to transmit light incident on the light transmission region,
wherein the light transmission unit has a side surface disposed in the package,
when viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter, and
wherein a thickness of the light transmitting unit is a value larger than a distance between the Fabry-Perot interference filter and the light detector.