US 11,835,338 B2
Sensor element, angular velocity sensor, and multi-axis angular velocity sensor
Munetaka Soejima, Soraku-gun (JP)
Assigned to Kyocera Corporation, Kyoto (JP)
Appl. No. 16/479,442
Filed by KYOCERA Corporation, Kyoto (JP)
PCT Filed Jan. 22, 2018, PCT No. PCT/JP2018/001724
§ 371(c)(1), (2) Date Jul. 19, 2019,
PCT Pub. No. WO2018/139396, PCT Pub. Date Aug. 2, 2018.
Claims priority of application No. 2017-009946 (JP), filed on Jan. 24, 2017.
Prior Publication US 2019/0376789 A1, Dec. 12, 2019
Int. Cl. G01C 19/5621 (2012.01); G01C 19/5656 (2012.01); B81B 3/00 (2006.01); H10N 30/03 (2023.01); H10N 30/30 (2023.01)
CPC G01C 19/5621 (2013.01) [B81B 3/0018 (2013.01); H10N 30/03 (2023.02); H10N 30/302 (2023.02); B81B 2201/02 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A sensor element, comprising:
a piezoelectric body which comprises
a base part and
a driving arm and a detecting arm which extend from the base part within a predetermined plane parallel to an xy plane in an orthogonal coordinate system xyz,
a plurality of excitation electrodes located on the driving arm,
a plurality of detecting electrodes which are located on the detecting arm in an arrangement enabling detection of a signal generated due to bending deformation of the detecting arm in the z-axis direction,
wherein the detecting arm comprises
a first arm extending from the base part within the predetermined plane and
a second arm which is connected to a front end side portion of the first arm, extends from a front end side of the first arm toward a base part side of the first arm within the predetermined plane, and comprises an end part on the base part side as a free end,
wherein at least part of the plurality of detecting electrodes are located on the second arm, and
wherein the plurality of detecting electrodes comprises a plurality of first electrodes located on the first arm and a plurality of second electrodes located on the second arm, and, among the plurality of first electrodes and the plurality of second electrodes, electrodes generating potentials having the same polarities as each other when the first arm and the second arms bend to inverse sides from each other in the z-axis direction are connected to each other.