US 11,835,278 B2
Temperature control medium processing apparatus and temperature control medium processing method
Hayato Sakai, Miyagi (JP); Takehiko Arita, Miyagi (JP); Haruka Kaneko, Miyagi (JP); and Satoshi Suzuki, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Feb. 26, 2021, as Appl. No. 17/186,127.
Claims priority of application No. 2020-032749 (JP), filed on Feb. 28, 2020.
Prior Publication US 2021/0270508 A1, Sep. 2, 2021
Int. Cl. F25B 41/40 (2021.01); F25B 49/00 (2006.01); F28F 27/02 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01)
CPC F25B 49/00 (2013.01) [F25B 41/40 (2021.01); F28F 27/02 (2013.01); F25B 2345/001 (2013.01); F25B 2345/002 (2013.01); F25B 2345/006 (2013.01); F25B 2345/0052 (2013.01); H01J 37/32724 (2013.01); H01L 21/67248 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a multiple number of processing modules configured to perform a processing on a substrate;
a multiple number of chiller modules configured to adjust a temperature of a temperature control medium and supply the temperature-adjusted temperature control medium into the processing modules;
a first circulation path through which the temperature control medium is supplied into one of the processing modules from one of the chiller modules, and connected to one of the processing modules and one of the chiller modules;
a second circulation path through which the temperature control medium is returned back into one of the chiller modules from one of the processing modules, and connected to one of the processing modules and one of the chiller modules;
a temperature control medium processing apparatus configured to collect the temperature control medium from one of the processing modules and one of the chiller modules or refill one of the processing modules and one of the chiller modules with the temperature control medium,
wherein the temperature control medium processing apparatus comprises:
a tank configured to store the temperature control medium therein;
a first inlet path which is connected to a first inlet opening of the tank, and through which the temperature control medium is introduced;
an inlet connector configured to connect the first inlet path and a path from one of the processing modules;
an outlet path which is connected to an outlet opening of the tank, and through which the temperature control medium flows out;
an outlet connector configured to connect the outlet path and a path to one of the processing modules; and
a pump provided at the outlet path, and configured to force the temperature control medium stored in the tank to flow out,
wherein the first inlet path is connected to the second circulation path and the outlet path is connected to the first circulation path,
wherein the first inlet path is different from the second circulation path,
wherein the outlet path is different from the first circulation path,
wherein the temperature control medium processing apparatus is shared by the multiple number of chiller modules and the multiple number of processing modules.