US 11,833,736 B2
Method of controlling imprint apparatus, imprint apparatus, and method of manufacturing article
Yoshihiro Koura, Utsunomiya (JP); and Kunihiko Asada, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 4, 2020, as Appl. No. 16/808,430.
Claims priority of application No. 2019-043044 (JP), filed on Mar. 8, 2019.
Prior Publication US 2020/0282630 A1, Sep. 10, 2020
Int. Cl. B29C 59/02 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01)
CPC B29C 59/02 (2013.01) [G03F 7/0002 (2013.01); H01L 21/027 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method of controlling an imprint apparatus that performs an imprint process to form a pattern on an imprint material by using a mold on a shot region of a substrate, the method comprising:
inspecting to determine whether to continue or stop a series of imprint processes during the series of imprint processes in a lot including a plurality of substrates,
wherein the inspecting includes:
capturing an image of the pattern formed on the shot region by the imprint process,
obtaining, by comparing a position of a peripheral portion of the pattern in the image obtained in the capturing and a design value of the position of the peripheral portion, an extrusion amount of the imprint material from the shot region due to the imprint process, and
determining, based on information indicating a change in the extrusion amount over a plurality of imprint processes, an imprint process count indicating a number of imprint processes to be continuously performed in the lot and a next process to transition from a current process upon stopping the series of imprint processes in the lot, wherein determining includes predicting the imprint process count at which the extrusion amount will reach over a tolerance, based on the information indicating the change in the extrusion amount over the plurality of imprint processes.