US 11,833,720 B2
Imprint method, imprint apparatus, and article manufacturing method
Hiroyuki Sekiguchi, Tochigi (JP); and Kenichi Kobayashi, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 26, 2021, as Appl. No. 17/239,795.
Claims priority of application No. 2020-081502 (JP), filed on May 1, 2020.
Prior Publication US 2021/0339433 A1, Nov. 4, 2021
Int. Cl. B29C 35/08 (2006.01); B29C 59/02 (2006.01); B29C 35/02 (2006.01); B29C 59/16 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); B29L 31/34 (2006.01)
CPC B29C 35/0888 (2013.01) [B29C 35/0288 (2013.01); B29C 59/02 (2013.01); B29C 59/16 (2013.01); G03F 7/0002 (2013.01); G03F 7/2012 (2013.01); G03F 9/7042 (2013.01); B29L 2031/34 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An imprint method of molding an imprint material on a shot region of a substrate using a mold, the method comprising:
aligning the shot region and the mold in a state where the imprint material and a pattern region of the mold are in contact with each other; and
curing the imprint material by irradiating the imprint material with curing light after the aligning,
wherein the aligning is controlled so as to include an overlap period during which a period during which deformation light used to deform the shot region is applied to the substrate through the imprint material and a period during which polymerization light used to increase a viscosity of the imprint material is applied to the imprint material overlap each other, and
light amount of the polymerization light to be applied to the imprint material is controlled in accordance with light amount of the deformation light to be applied to the imprint material during the overlap period.
 
11. An imprint method of molding an imprint material on a shot region of a substrate using a mold, the method comprising:
aligning the shot region and the mold in a state where the imprint material and a pattern region of the mold are in contact with each other; and
curing the imprint material by irradiating the imprint material with curing light after the aligning,
wherein the aligning is controlled so as to include an overlap period during which a period during which deformation light used to deform the shot region is applied to the substrate through the imprint material and a period during which polymerization light used to increase a viscosity of the imprint material is applied to the imprint material overlap each other, and
the polymerization light to be applied to the imprint material is controlled in accordance with the deformation light to be applied to the imprint material during the overlap period, wherein
the period during which the polymerization light is applied to the imprint material includes a period after the overlap period in addition to the overlap period, and
in the period after the overlap period, a first irradiator applies the polymerization light to the imprint material, and in the overlap period, a second irradiator different from the first irradiator applies the polymerization light to the imprint material.
 
18. An article manufacturing method comprising:
forming a pattern on a substrate following an imprint method defined in claim 1; and
processing the substrate on which the pattern has been formed in the forming,
wherein an article is obtained from the substrate having undergone the processing.