US 11,832,981 B2
X-ray fluorescence spectrometer
Yoshiyuki Kataoka, Otsu (JP); Yasuhiko Nagoshi, Kobe (JP); and Eiichi Furusawa, Ibaraki (JP)
Assigned to Rigaku Corporation, Akishima (JP)
Filed by Rigaku Corporation, Tokyo (JP)
Filed on May 26, 2023, as Appl. No. 18/202,499.
Application 18/202,499 is a continuation of application No. PCT/JP2021/033636, filed on Sep. 14, 2021.
Claims priority of application No. 2020-198816 (JP), filed on Nov. 30, 2020.
Prior Publication US 2023/0293129 A1, Sep. 21, 2023
Int. Cl. G01N 23/223 (2006.01); A61B 6/00 (2006.01)
CPC A61B 6/48 (2013.01) [A61B 6/54 (2013.01); G01N 23/223 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An X-ray fluorescence spectrometer which obtains a quantitative value of a content of a component in a sample and/or a quantitative value of a thickness of the sample, based on corrected intensities obtained by irradiating the sample with primary X-rays, measuring intensities of generated secondary X-rays, and performing counting loss correction, the X-ray fluorescence spectrometer comprising
a counting time calculation unit configured to calculate a counting time for each of measurement lines which are secondary X-rays to be measured for intensities, wherein
by regarding total precision of an X-ray intensity as counting precision due to statistical fluctuation and counting loss, and
by regarding the counting precision as a product of precision of an uncorrected intensity, which is an intensity before the counting loss correction is performed, and a gradient of the corrected intensity with respect to the uncorrected intensity,
the counting time calculation unit calculates the counting time from specified total precision of the X-ray intensity, a given counting loss correction coefficient, and a given corrected intensity for each measurement line.