| CPC H01M 4/0428 (2013.01) [C23C 16/405 (2013.01); C23C 16/45553 (2013.01); H01M 2004/028 (2013.01)] | 17 Claims |

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1. A method of coating a cathode or a cathode active material with a metal oxide film, the method comprising the steps of:
a1. exposing the cathode or cathode active material to a chemical precursor vapor comprising a precursor of the formula M(═NRa)(ORb)2(NR22) and an oxygen source as an oxidizing co-reactant, and
b1. depositing the metal oxide film on the cathode or cathode active material,
wherein:
M is selected from Nb, Ta, or V,
Ra is selected from iPr, tBu, t-Am
Rb each is independently selected from Et, iPr, tBu, sBu or SPen, and
Rc each is independently selected from Et or Me.
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