| CPC H01L 22/12 (2013.01) [H01L 23/481 (2013.01); H01L 24/16 (2013.01); H01L 25/0652 (2013.01); H10D 88/00 (2025.01); H01L 2224/16245 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06596 (2013.01)] | 14 Claims |

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1. A method of determining a density of through-silicon vias (TSVs) for a die in a three-dimensional (3D) stacked die, comprising:
obtaining first power consumption information associated with a first die of the 3D stacked die;
obtaining second power consumption information associated with a second die of the 3D stacked die;
identifying, on the first die, an area associated with the second die, the identified area overlapping an area associated with the first die; and
determining a density of TSVs for the identified area based at least on the first power consumption information and the second power consumption information.
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