US 12,489,007 B2
Substrate storage container
Junya Toda, Saitama (JP); and Takashi Suda, Niigata (JP)
Assigned to Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Appl. No. 17/640,336
Filed by Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
PCT Filed Aug. 7, 2020, PCT No. PCT/JP2020/030400
§ 371(c)(1), (2) Date Mar. 4, 2022,
PCT Pub. No. WO2021/044805, PCT Pub. Date Mar. 11, 2021.
Claims priority of application No. 2019-161860 (JP), filed on Sep. 5, 2019.
Prior Publication US 2022/0344186 A1, Oct. 27, 2022
Int. Cl. H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67386 (2013.01) [H01L 21/67383 (2013.01); H01L 21/6773 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A substrate storage container, comprising:
a main body, and
a transport component configured to be removably mountable to the main body, wherein
the main body has a surface having a first protrusion protruding from the surface and a first engaging portion,
the transport component has a surface having a second protrusion protruding from the surface and a second engaging portion,
the transport component is configured to be moved to a first side from a second side opposite to the first side in a first direction relative to the main body to be mounted to the main body,
in a mounted state in which the transport component is mounted to the main body, the surface of the transport component faces the surface of the main body in a second direction orthogonal to the first direction,
in the mounted state, the second engaging portion is engaged with the first engaging portion in the second direction to restrict a relative displacement between the main body and the transport component in the second direction,
in the mounted state, a top portion of the first protrusion overlaps a top portion of the second protrusion in the second direction, and the top portion of the second protrusion is positioned on the first side of the top portion of the first protrusion in the first direction such that the second protrusion is engaged with the first protrusion in the first direction to restrict a relative displacement of the transport component with respect to the main body to the second side in the first direction, and
the first protrusion and the second protrusion are each displaced to an opposite side in the second direction when subjected to a predetermined load toward the opposite side in the second direction, and the second protrusion is displaced by a smaller amount than the first protrusion.