| CPC H01J 37/3211 (2013.01) [H01J 37/32715 (2013.01)] | 6 Claims |
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1. An apparatus for processing substrate comprising:
a support plate;
an antenna disposed in parallel to one surface of the support plate, the antenna having 1st to n-th turns (n=an integer greater than 4) spaced apart from each other and wound along one direction from an inner end;
a plurality of supporters fixed between the (m−1)-th turn and the m-th turn of the antenna to limit movement of the (m−1)-th turn and the m-th turn (m=an integer greater than 3 and less than n); and
a distance control unit capable of adjusting separation distances formed between the 1st to the (m−1)-th turns by rotating the inner end of the antenna in the one direction or in a direction opposite to the one direction, the distance control unit including a holder connected to the inner end of the antenna and a driving motor connected to the holder to rotate the antenna,
wherein the antenna includes:
an inner part having the 1st to the (m−1)-th turns and being located inside the supporters, the separation distances formed between the 1st to the (m−1)-th turns being adjustable when the antenna is rotated; and
an outer part having the m-th to the n-th turns and being located outside the supporters, the separation distances formed between the m-th to the n-th turns being maintained substantially the same when the antenna is rotated, and
wherein outward movement of the (m−1)-th turn and inward movement of the m-th turn are limited by the supporters.
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