US 12,488,958 B2
Method for operating a multi-beam particle beam microscope
Dirk Zeidler, Oberkochen (DE); Gregor Dellemann, Aalen (DE); and Gunther Scheunert, Muenster (DE)
Assigned to Carl Zeiss MultiSEM GmbH, Oberkochen (DE)
Filed by Carl Zeiss MultiSEM GmbH, Oberkochen (DE)
Filed on May 24, 2024, as Appl. No. 18/674,512.
Application 18/674,512 is a continuation of application No. 18/181,395, filed on Mar. 9, 2023, granted, now 12,094,683.
Application 18/181,395 is a continuation of application No. 17/212,642, filed on Mar. 25, 2021, granted, now 11,735,393, issued on Aug. 22, 2023.
Application 17/212,642 is a continuation of application No. PCT/EP2019/076429, filed on Sep. 30, 2019.
Claims priority of application No. 102018124044 (DE), filed on Sep. 28, 2018.
Prior Publication US 2024/0312759 A1, Sep. 19, 2024
Int. Cl. H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/28 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24578 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
using a multi-beam particle beam microscope to direct a plurality of particle beams onto an object, thereby generating a plurality of electron beams emanating from the object;
directing signals of electron beams emanating from impingement locations of the particle beams at the object onto an array of detector elements;
detecting the signals directed onto the array of detector elements, and generating an image based on the detected signals;
identifying a plurality of regions in the image, a number of the plurality of identified regions being equal to a number of the plurality of the particle beams;
for each identified region, determining a correspondence to one particle beam of the plurality of particle beams; and
based on detected electrons of the electron beams emanating from the impingement locations of the particle beams at the object and the determined correspondences of the plurality of the identified regions to the plurality of the particle beams, using the multi-beam particle beam microscope to generate particle microscopic images.