US 12,488,452 B2
Wafer bath imaging
Joel Estrella, Austin, TX (US); Ihsan Simms, Austin, TX (US); Michael Carcasi, Austin, TX (US); Joshua Hooge, Austin, TX (US); and Hiroshi Marumoto, Koshi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 16, 2021, as Appl. No. 17/349,538.
Prior Publication US 2022/0405902 A1, Dec. 22, 2022
Int. Cl. G06T 7/00 (2017.01); B08B 3/08 (2006.01); B08B 3/10 (2006.01); B08B 13/00 (2006.01); G06K 9/00 (2022.01); G06K 9/20 (2006.01); G06K 9/46 (2006.01); G06T 7/11 (2017.01); G06T 7/50 (2017.01); G06V 10/22 (2022.01); G06V 10/60 (2022.01); G06V 20/40 (2022.01); G10L 25/51 (2013.01); H01L 21/67 (2006.01)
CPC G06T 7/001 (2013.01) [B08B 3/08 (2013.01); B08B 3/106 (2013.01); B08B 13/00 (2013.01); G06T 7/11 (2017.01); G06T 7/50 (2017.01); G06V 10/22 (2022.01); G06V 10/60 (2022.01); G06V 20/46 (2022.01); G10L 25/51 (2013.01); H01L 21/67057 (2013.01); H01L 21/67253 (2013.01); B08B 2203/007 (2013.01); G06T 2207/10016 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30242 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of monitoring a bath process, the method comprising:
processing a first wafer by submerging the first wafer within a bath solution;
capturing a video of the bath solution containing the first wafer during a first time interval, wherein the first wafer remains stationary in the bath solution;
analyzing the video based on intensity of light captured in a frame of the video, wherein analyzing the video comprises dividing each frame of the video being analyzed into an array of pixels based on a sensor size of a camera capturing the video, and calculating a pixel intensity of light for each of the array of pixels; and
based on analyzing the video, determining a first metric of the bath solution and a second metric of the bath solution during the first time interval, wherein determining the first metric of the bath solution during the first time interval comprises determining the first metric based on the pixel intensity of light for each of the array of pixels, the second metric being based on a directionality of the intensity of light captured in each frame of the video being analyzed.