US 12,488,449 B2
Analysis of material layers on surfaces, and related systems and methods
Doris Pik-Yiu Chun, Santa Cruz, CA (US); and Ian David Parker, Santa Barbara, CA (US)
Assigned to Kateeva, Inc., Newark, CA (US)
Filed by Kateeva, Inc., Newark, CA (US)
Filed on Sep. 13, 2023, as Appl. No. 18/466,174.
Application 16/786,248 is a division of application No. 15/954,923, filed on Apr. 17, 2018, granted, now 10,608,182, issued on Mar. 31, 2020.
Application 18/466,174 is a continuation of application No. 18/060,930, filed on Dec. 1, 2022, granted, now 11,800,781.
Application 18/060,930 is a continuation of application No. 17/443,798, filed on Jul. 27, 2021, granted, now 11,545,628, issued on Jan. 3, 2023.
Application 17/443,798 is a continuation of application No. 16/786,248, filed on Feb. 10, 2020, granted, now 11,107,991, issued on Aug. 31, 2021.
Claims priority of provisional application 62/487,962, filed on Apr. 20, 2017.
Prior Publication US 2023/0422591 A1, Dec. 28, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G06T 11/60 (2006.01); G06T 7/00 (2017.01); G06T 11/00 (2006.01); G06T 11/20 (2006.01); H10K 59/80 (2023.01); H10K 71/70 (2023.01); H10K 71/13 (2023.01)
CPC G06T 7/0004 (2013.01) [G06T 7/0008 (2013.01); G06T 7/001 (2013.01); G06T 11/001 (2013.01); G06T 11/206 (2013.01); G06T 11/60 (2013.01); H10K 59/8731 (2023.02); H10K 71/70 (2023.02); G06T 2200/24 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/10028 (2013.01); G06T 2207/20072 (2013.01); G06T 2207/20224 (2013.01); G06T 2207/30121 (2013.01); G06T 2207/30148 (2013.01); H10K 71/135 (2023.02)] 17 Claims
OG exemplary drawing
 
1. A method of analyzing a film on a substrate, the method comprising:
receiving surface profile data of a substrate having a film layer, wherein the substrate comprises pixels;
from the surface profile data and a predetermined pattern of the substrate, resolving a parameter selected from a thickness of the film layer, an area aperture ratio of the film layer, and a pitch of the substrate; and
displaying, on a display:
a graphical representation of a region of the substrate;
a cursor for selecting a location of the graphical representation of the region of the substrate; and
a graphical representation of the parameter that responds to a selection of a plurality of the pixels by:
displaying, on the display, a plurality of graphs of the parameter, one graph for each pixel; or
displaying, on the display, a composite graph showing the parameter for each pixel.