| CPC G02B 26/128 (2013.01) [G02B 26/04 (2013.01); G02B 26/101 (2013.01); G02B 26/121 (2013.01); G02B 26/123 (2013.01); G02B 2207/117 (2013.01)] | 20 Claims |
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1. A laser device, comprising:
a light source part that emits a laser beam;
an optical path adjustment part that reflects the laser beam emitted from the light source part and adjusts an irradiation direction of the laser beam;
a light distribution part that splits the laser beam reflected from the optical path adjustment part into a plurality of sub-beams and irradiates the plurality of sub-beams to a substrate;
a drive part that moves the light distribution part and adjusts relative positions between the light distribution part and the substrate;
a sensing part that senses the plurality of sub-beams emitted from the substrate; and
a control part that adjusts an arrangement of the optical path adjustment part and moves the drive part to adjust an arrangement of the light distribution part, wherein
the control part generates an image based on a signal sensed by the sensing part and measures an image contrast of the image,
the control part records and compares a plurality of image contrasts according to the position of the light distribution part to determine an optimal position of the light distribution part,
the light source part emits a first laser beam and aligns the light distribution part, and
the light source part emits a second laser beam having a greater intensity than an intensity of the first laser beam for laser processing the substrate.
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