US 12,487,334 B2
Optical antenna, optical phased array transmitter, and lidar system using the same
Jing Wang, Shenzhen (CN)
Assigned to SUTENG INNOVATION TECHNOLOGY CO., LTD., Shenzhen (CN)
Filed by SUTENG INNOVATION TECHNOLOGY CO., LTD., Shenzhen (CN)
Filed on Jan. 4, 2022, as Appl. No. 17/567,960.
Application 17/567,960 is a continuation of application No. PCT/CN2019/095484, filed on Jul. 10, 2019.
Prior Publication US 2022/0128661 A1, Apr. 28, 2022
Int. Cl. G01S 7/481 (2006.01); G01S 17/86 (2020.01); G02B 6/124 (2006.01); G02B 27/00 (2006.01); G02B 6/12 (2006.01)
CPC G01S 7/4814 (2013.01) [G01S 17/86 (2020.01); G02B 6/124 (2013.01); G02B 27/0087 (2013.01); G02B 2006/12104 (2013.01); G02B 2006/12107 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An optical antenna for light transmission, comprising:
a substrate that forms at least a portion of a reflector layer, the reflector layer comprising a first material;
a waveguide layer disposed above the reflector layer, the waveguide layer transmitting light and comprising a second material; and
a separation layer disposed between the waveguide layer and the reflector layer, the separation layer comprising a third material,
wherein the waveguide layer further comprises:
a first grating array;
a waveguide sub-layer disposed above the separation layer, the waveguide sub-layer comprising a fourth material;
a high-refractive-index layer disposed above the waveguide sub-layer, the high-refractive-index layer comprising the second material; and
a thin oxidized layer disposed between the waveguide sub-layer and the high-refractive-index layer, the thin oxidized layer comprising a fifth material,
wherein the first grating array is located in the high-refractive-index layer, a refractive index of the fifth material is smaller than that of either the second material or the fourth material,
wherein the reflector layer reflects the light emitted downwards from the waveguide layer, and
wherein a refractive index of the third material is smaller than that of either the first material or the second material.