US 12,487,136 B2
Force sensor and robot equipped with force sensor
Chihiro Nagura, Kanagawa (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Nov. 6, 2023, as Appl. No. 18/502,575.
Application 18/502,575 is a continuation of application No. 16/845,199, filed on Apr. 10, 2020, granted, now 11,841,287.
Application 16/845,199 is a continuation of application No. PCT/JP2018/038908, filed on Oct. 12, 2018.
Claims priority of application No. 2017-201155 (JP), filed on Oct. 17, 2017.
Prior Publication US 2024/0077372 A1, Mar. 7, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01L 5/169 (2020.01); B25J 13/08 (2006.01); G01L 5/164 (2020.01); G01L 5/165 (2020.01)
CPC G01L 5/169 (2020.01) [B25J 13/085 (2013.01); G01L 5/164 (2013.01); G01L 5/165 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A force sensor comprising:
a base unit;
a displacement unit configured to be displaced with respect to said base unit by receiving an external force;
a first displacement sensor pair including two sets of sensors that detect a relative displacement between said base unit and said displacement unit in a first direction; and
a second displacement sensor pair including two sets of sensors that detect a relative displacement between said base unit and said displacement unit in a second direction intersecting the first direction,
wherein among four quadrants divided by two straight lines along each of the first direction and the second direction, the straight lines passing through a midpoint of the two sets of sensors composing said first displacement sensor pair, the two sets of sensors composing said second displacement sensor pair are respectively disposed in two quadrants in which the two sets of sensors composing said first displacement sensor pair are respectively disposed, and
wherein the two sets of sensors composing said first displacement sensor pair are separated from each other by a predetermined distance in each of the first direction and the second direction, and the two sets of sensors composing said second displacement sensor pair are separated from each other by a predetermined distance in each of the first direction and the second direction.