US 12,487,082 B2
Method for positioning substrate
Tsuyoshi Kobayashi, Hiroshima (JP); Toru Yuki, Hiroshima (JP); and Kisato Hirata, Hiroshima (JP)
Assigned to JEL CORPORATION, (JP)
Appl. No. 17/636,764
Filed by JEL CORPORATION, Hiroshima (JP)
PCT Filed May 14, 2020, PCT No. PCT/JP2020/019236
§ 371(c)(1), (2) Date Feb. 18, 2022,
PCT Pub. No. WO2021/033377, PCT Pub. Date Feb. 25, 2021.
Claims priority of application No. 2019-152239 (JP), filed on Aug. 22, 2019.
Prior Publication US 2022/0299317 A1, Sep. 22, 2022
Int. Cl. H01L 21/68 (2006.01); G01B 11/27 (2006.01)
CPC G01B 11/272 (2013.01) [H01L 21/68 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method for adjusting a position of a substrate, comprising:
measuring, using an optical member, positions of edge portions of a substrate along an entire periphery of the substrate placed on a stage, thereby acquiring primary positional data indicating the positions of the edge portions;
moving the stage with a parallel movement in a direction along a surface of the substrate by a predetermined amount and measuring, using the optical member, positions of the edge portions of the substrate along the entire periphery of the substrate after the stage has been moved, thereby acquiring secondary positional data indicating the positions of the edge portions after the stage has been moved;
calculating, using the primary positional data and the secondary positional data, difference amounts between the positions of the edge portions before the stage has been moved and the positions of the edge portions after the stage has been moved, along the entire periphery of the substrate; and
calculating an optical magnification ratio of each of the edge portions from each of the difference amounts and an amount of movement of the stage and correcting each of the positions of the edge portions of the primary positional data based on the calculated optical magnification ratio of each of the edge portions, thereby acquiring corrected positional data.