US 12,487,079 B2
Measurement device and board inspection device
Takahiro Matsukubo, Iwata (JP); and Takeshi Arai, Iwata (JP)
Assigned to YAMAHA HATSUDOKI KABUSHIKI KAISHA, Iwata (JP)
Appl. No. 18/555,212
Filed by YAMAHA HATSUDOKI KABUSHIKI KAISHA, Iwata (JP)
PCT Filed Apr. 23, 2021, PCT No. PCT/JP2021/016516
§ 371(c)(1), (2) Date Oct. 12, 2023,
PCT Pub. No. WO2022/224455, PCT Pub. Date Oct. 27, 2022.
Prior Publication US 2024/0200934 A1, Jun. 20, 2024
Int. Cl. G01B 11/25 (2006.01)
CPC G01B 11/2518 (2013.01) [G01B 11/2531 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A measurement device comprising:
an imager to image a measurement target;
a first projector on a first side with respect to the imager to project a linear first measurement light beam onto the measurement target from a direction inclined at a first angle with respect to a horizontal direction;
a second projector on the first side with respect to the imager to project a linear second measurement light beam onto the measurement target from a direction inclined at a second angle different from the first angle with respect to the horizontal direction; and
a controller configured or programmed to remove reflected light noise based on the first measurement light beam and the second measurement light beam projected onto the measurement target and imaged by the imager and acquire height information of the measurement target.