US 12,487,070 B2
Microsystem for measuring rotational movement and measurement device therefor
Guillaume Jourdan, Grenoble (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed on Dec. 16, 2022, as Appl. No. 18/083,026.
Claims priority of application No. 2113767 (FR), filed on Dec. 17, 2021.
Prior Publication US 2023/0194236 A1, Jun. 22, 2023
Int. Cl. G01B 7/16 (2006.01)
CPC G01B 7/18 (2013.01) 17 Claims
OG exemplary drawing
 
1. A microsystem comprising:
a substrate;
a main part connected to the substrate via an anchor;
a moving part configured to rotate about an axis of rotation O;
a first beam connecting the moving part to the main part, a main direction of said first beam being along a first vector ej1 having as origin a junction M1 of the moving part with the first beam and as direction the main part;
a second beam connecting the moving part to the main part, the main direction of said second beam being along a second vector ej2 having as origin a junction M2 of the moving part with the second beam and as direction the main part;
wherein the first vector ej1 and the second vector ej2 have the same direction and are of opposite sense, a position of the junctions M1 and M2 being chosen so that the vector product O′M1 ej1 and the vector product O′M2 ej2 have the same sign, where O′ is a point of intersection between the axis of rotation O and a plane perpendicular to said axis containing the first vector ej1 and the second vector ej2, the first and second beams being connected to the anchor via the main part.