US 12,486,598 B2
Rocking type seed crystal surface corrosion, cleaning and drying device and process method
Jian Jiang, Hebei (CN); Niefeng Sun, Hebei (CN); Tongnian Sun, Hebei (CN); Shujie Wang, Hebei (CN); Huimin Shao, Hebei (CN); Lijie Fu, Hebei (CN); Yanlei Shi, Hebei (CN); and Xiaolan Li, Hebei (CN)
Assigned to THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION, Shijiazhuang (CN)
Filed by THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION, Hebei (CN)
Filed on Aug. 3, 2022, as Appl. No. 17/880,597.
Application 17/880,597 is a continuation of application No. PCT/CN2021/090859, filed on Apr. 29, 2021.
Prior Publication US 2023/0038976 A1, Feb. 9, 2023
Int. Cl. C30B 35/00 (2006.01); C30B 29/40 (2006.01); C30B 33/10 (2006.01)
CPC C30B 35/007 (2013.01) [C30B 29/40 (2013.01); C30B 33/10 (2013.01); C30B 35/00 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A rocking type seed crystal surface corrosion, cleaning and drying device, comprising a corrosion tank (1) and a matched corrosion tank cover (2), a seed crystal support platform arranged at a middle position of the bottom of the corrosion tank (1), and a high-purity hot nitrogen introduction straight pipe (1-1), an corrosive liquid introduction straight pipe (1-2), a deionized water introduction straight pipe (1-3) and an overflow liquid discharge straight pipe (1-4) matched with and arranged at both sides of the corrosion tank (1), wherein free ends of the high-purity hot nitrogen introduction straight pipe (1-1), the corrosive liquid introduction straight pipe (1-2) and the deionized water introduction straight pipe (1-3) are all provided with switch stop valves, characterized in that the device further comprises a rocking mechanism provided at the bottom of the corrosion tank (1); and the seed crystal support platform comprises a support frame (3-1) symmetrically distributed on both sides of a vertical central axis of the corrosion tank (1) and positioned at the bottom of the corrosion tank (1), a seed crystal support wheel (3-2) mounted on an upper end of the support frame (3-1) via a rotating shaft, and a matched seed crystal support wheel limiting mechanism.