US 12,486,592 B2
Heater in hot-zone of single crystal pulling apparatus and single crystal pulling apparatus
Wenwu Yang, Xi'an (CN); and Bokcheol Sim, Xi'an (CN)
Assigned to XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD., Xi'an (CN); and XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD., Xi'an (CN)
Appl. No. 17/914,720
Filed by Xi'an ESWIN Material Technology Co., Ltd., Xi'an (CN); and Xi'an ESWIN Silicon Wafer Technology Co., Ltd., Xi'an (CN)
PCT Filed Sep. 24, 2021, PCT No. PCT/CN2021/120451
§ 371(c)(1), (2) Date Sep. 26, 2022,
PCT Pub. No. WO2022/068700, PCT Pub. Date Apr. 7, 2022.
Claims priority of application No. 202011053337.0 (CN), filed on Sep. 29, 2020.
Prior Publication US 2023/0349066 A1, Nov. 2, 2023
Int. Cl. C30B 35/00 (2006.01); C30B 15/14 (2006.01); C30B 15/20 (2006.01)
CPC C30B 15/14 (2013.01) [C30B 15/20 (2013.01); C30B 35/00 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A heater in a Hot-Zone of a single crystal pulling apparatus, comprising:
a side-main heater; and
an auxiliary heater;
wherein each of the side-main heater and the auxiliary heater comprises a cylindrical structure with openings at two ends thereof, each of the side-main heater and the auxiliary heater includes a top open end and a bottom open end, the auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater; the side-main heater includes a heater body located between the top open end of the side-main heater and the bottom open end of the side-main heater;
wherein the auxiliary heater includes:
a protective casing surrounding the side-main heater; and
an electromagnetic induction coil accommodated in the protective casing;
wherein the protective casing includes an inner casing and an outer casing that are fastened to each other; and
wherein,
each of the inner casing and the outer casing is cylindrical;
the inner casing covers and surrounds an entire outer peripheral side of the heater body of the side-main heater;
the outer casing is sleeved around the inner casing with a chamber defined between the outer casing and the inner casing;
the inner casing includes a first inner side wall that cooperates with the outer casing to define the chamber;
the electromagnetic induction coil is accommodated in the chamber;
the electromagnetic induction coil is spirally wound around the first inner side wall from a top open end of the inner casing to a bottom open end of the inner casing; and
two ends of the electromagnetic induction coil extend out of the protective casing, respectively.