US 12,486,576 B2
Shadow ring lift to improve wafer edge performance
Zubin Huang, Santa Clara, CA (US); Jallepally Ravi, San Ramon, CA (US); Kai Wu, Palo Alto, CA (US); and Xiaoxiong Yuan, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 13, 2021, as Appl. No. 17/473,118.
Claims priority of provisional application 63/217,583, filed on Jul. 1, 2021.
Prior Publication US 2023/0002894 A1, Jan. 5, 2023
Int. Cl. C23C 16/458 (2006.01); C23C 16/06 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01)
CPC C23C 16/4585 (2013.01) [C23C 16/06 (2013.01); C23C 16/50 (2013.01); H01J 37/32715 (2013.01); H01L 21/68721 (2013.01); H01L 21/68742 (2013.01); H01L 21/76843 (2013.01); H01L 21/76876 (2013.01); H01L 21/76879 (2013.01); H01L 23/53266 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/332 (2013.01)] 19 Claims
OG exemplary drawing
 
9. A process chamber for substrate processing, comprising:
a chamber body comprising a lower wall;
a substrate support assembly disposed within the chamber body, the substrate support assembly comprising:
a substrate support;
a purge ring defining a radially outward edge of the substrate support;
a plurality of substrate lift pins disposed through the substrate support and radially inward of the purge ring; and
a shadow ring lift assembly, the shadow ring lift assembly configured to raise and lower a shadow ring positioned around the purge ring of the substrate support, the shadow ring lift assembly comprising:
a lift hoop configured to support the plurality of substrate lift pins;
a shadow ring lift arm disposed away from the lower wall, while in a raised position;
a plurality of lift pin housings coupled to the plurality of substrate lift pins;
a shadow ring lift plate coupled to the plurality of lift pin housings; and
a plurality of shadow ring lift pins disposed radially outward of the substrate support, the plurality of substrate lift pins, and the lift hoop.