US 12,486,569 B2
Infiltrated carbon nanotubes
Robert Davis, Provo, UT (US); Richard Vanfleet, Provo, UT (US); Kyle Zufelt, Middleton, ID (US); and David Jensen, Provo, UT (US)
Assigned to TULA HEALTH, INC., Kaysville, UT (US)
Filed by Brigham Young University, Provo, UT (US)
Filed on Aug. 25, 2023, as Appl. No. 18/456,163.
Application 18/456,163 is a continuation in part of application No. 16/854,534, filed on Apr. 21, 2020, granted, now 11,885,011.
Application 16/854,534 is a continuation of application No. 13/924,154, filed on Jun. 21, 2013, abandoned.
Claims priority of provisional application 61/690,222, filed on Jun. 21, 2012.
Prior Publication US 2023/0407462 A1, Dec. 21, 2023
Int. Cl. B32B 9/00 (2006.01); C01B 32/158 (2017.01); C01B 32/16 (2017.01); C01B 32/168 (2017.01); C01B 32/178 (2017.01); C23C 16/01 (2006.01); C23C 16/04 (2006.01); C23C 16/26 (2006.01); B82Y 30/00 (2011.01)
CPC C23C 16/045 (2013.01) [C01B 32/158 (2017.08); C01B 32/16 (2017.08); C01B 32/168 (2017.08); C01B 32/178 (2017.08); C23C 16/01 (2013.01); C23C 16/26 (2013.01); B82Y 30/00 (2013.01); Y10T 428/30 (2015.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a first carbon nanotube, comprising:
a first top surface; and
a first bottom surface;
a second carbon nanotube vertically aligned with the first carbon nanotube, the second carbon nanotube comprising:
a second top surface; and
a second bottom surface, wherein the first carbon nanotube and the second carbon nanotube are infiltrated with carbon by a mixture that is flowing and having a temperature between 800 and 950 degrees Celsius, the mixture comprising:
a first amount of ethylene between 150 standard cubic centimeter per minute (sccm) and 200 sccm; and
a second amount of hydrogen between 100 sccm and 200 sccm, wherein the hydrogen is 25-75% of the flow, wherein infiltrating the first carbon nanotube and the second carbon nanotube with carbon causes the first carbon nanotube and the second carbon nanotube to have carbon deposits formed thereon and to not delaminate from a substrate during cooling subsequent the infiltrating; and
a thin film extending along the first bottom surface and the second bottom surface, wherein the thin film is suspended between the first carbon nanotube and the second carbon nanotube.