US 12,486,561 B2
Hard coating
Yuta Ikeda, Amagasaki (JP); Yoshinobu Yano, Amagasaki (JP); Tomoko Amano, Amagasaki (JP); Rabie Benioub, Amagasaki (JP); and Shinichiro Sato, Amagasaki (JP)
Assigned to SEAVAC, INC.
Appl. No. 18/837,568
Filed by SEAVAC, INC., Amagasaki (JP)
PCT Filed Dec. 22, 2022, PCT No. PCT/JP2022/047417
§ 371(c)(1), (2) Date Feb. 25, 2025,
PCT Pub. No. WO2023/157466, PCT Pub. Date Aug. 24, 2023.
Claims priority of application No. 2022-021468 (JP), filed on Feb. 15, 2022.
Prior Publication US 2025/0215550 A1, Jul. 3, 2025
Int. Cl. C23C 14/06 (2006.01); C23C 14/32 (2006.01)
CPC C23C 14/0641 (2013.01) [C23C 14/325 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A hard coating, comprising:
a lower layer having a composition composed of (Ti, Al) N;
an intermediate layer formed on the lower layer; and
an upper layer formed on the intermediate layer and having a composition composed of (Al, Ti, Cr, M) N, wherein
the M represents one or more elements selected from Mo, V, and Y,
the intermediate layer has a substantial composition composed of (Al, Ti, Cr, M) N and has the composition between the composition of the lower layer and the composition of the upper layer, each of an atomic proportion of Al, and an atomic proportion of Ti changes in a film thickness direction from a side of the lower layer toward a side of the upper layer, and each of an atomic proportion of Crj, and an atomic proportion of M is larger as closer to the side of the upper layer in the film thickness direction, and
the intermediate layer is a film in which films having a same composition as the upper layer and films having a same composition as the lower layer are alternately stacked.