US 12,156,406 B2
Methods of forming integrated assemblies with improved charge migration impedance
Byeung Chul Kim, Boise, ID (US); and Shyam Surthi, Boise, ID (US)
Filed by Lodestar Licensing Group LLC, Evanston, IL (US)
Filed on Oct. 14, 2021, as Appl. No. 17/501,951.
Application 17/501,951 is a division of application No. 16/681,200, filed on Nov. 12, 2019, granted, now 11,171,153.
Prior Publication US 2022/0037357 A1, Feb. 3, 2022
Int. Cl. H10B 43/27 (2023.01); H10B 43/10 (2023.01); H10B 43/35 (2023.01)
CPC H10B 43/27 (2023.02) [H10B 43/10 (2023.02); H10B 43/35 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A method of forming an integrated structure, comprising:
forming a vertical stack of alternating first and second levels; the first levels comprising a first material, and the second levels comprising a second material;
forming an opening to extend through the stack;
recessing the second levels relative to the first levels to form recessed second levels; the first levels having projecting terminal ends extending beyond the recessed second levels; cavities being along the recessed second levels and vertically between the projecting terminal ends;
forming a third material to extend around the projecting terminal ends and within the cavities, the third material narrowing the cavities;
forming a fourth material within the narrowed cavities;
removing regions of the third material to leave projecting structures along the second levels, the projecting structures comprising the fourth material; the projecting structures being vertically spaced from the projecting terminal ends by intervening gaps;
forming an additional first material to extend around the projecting terminal ends and around the projecting structures, and to extend into the intervening gaps;
converting most of the additional first material to a charge-blocking material, regions of the additional first material within the intervening gaps being non-converted regions; the non-converted regions being directly adjacent surfaces of the projecting terminal ends; the charge-blocking material extending vertically through the stack and having an edge with an undulating topography which defines pockets along the first levels;
forming a charge-storage material within the pockets; the charge-storage material and the charge-blocking material together forming a substantially flat surface;
forming a dielectric material along the substantially flat surface;
forming a channel material adjacent the dielectric material;
removing the first material of the first levels and the non-converted regions to leave voids; and
forming a conductive material within the voids.