US 12,155,375 B2
Acoustic wave element, acoustic wave filter device, and multiplexer
Yohei Konaka, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Aug. 31, 2022, as Appl. No. 17/899,667.
Claims priority of application No. 2021-152408 (JP), filed on Sep. 17, 2021.
Prior Publication US 2023/0275570 A1, Aug. 31, 2023
Int. Cl. H03H 9/64 (2006.01); H03H 9/145 (2006.01); H03H 9/72 (2006.01)
CPC H03H 9/6483 (2013.01) [H03H 9/145 (2013.01); H03H 9/725 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An acoustic wave element comprising:
a piezoelectric substrate;
an interdigital transducer (IDT) electrode on the piezoelectric substrate and including a plurality of comb-shaped electrodes; and
a reflector adjacent to the IDT electrode in an acoustic wave propagation direction; wherein
the comb-shaped electrodes include a plurality of comb-shaped electrode fingers extending in a direction intersecting the acoustic wave propagation direction;
the reflector includes a plurality of reflecting-electrode fingers extending in a direction intersecting the acoustic wave propagation direction;
when, in the a plurality of electrode fingers included in the IDT electrode and the reflector, a center-to-center distance between ones of the electrode fingers adjacent to each other in the acoustic wave propagation direction is defined as an electrode-finger pitch:
an electrode-finger pitch of the plurality of reflecting-electrode fingers is greater than an electrode-finger pitch of the plurality of comb-shaped electrode fingers; and
a center-to-center distance in the acoustic wave propagation direction between a reflecting-electrode finger closest to the IDT electrode of the plurality of reflecting-electrode fingers and a comb-shaped electrode finger closest to the reflector of the plurality of comb-shaped electrode fingers is equal to or less than about 0.9 times the electrode-finger pitch of the plurality of reflecting-electrode fingers;
when a reflecting-electrode finger counted from one of the reflecting-electrode fingers which is closest to the IDT electrode in a direction away from the IDT electrode is designated as a k-th reflecting-electrode finger in order, where k is an integer equal to or greater than 1;
one of the reflecting-electrode fingers farthest from the IDT electrode is defined as an (n+1)-th reflecting-electrode finger, where n is an integer greater than k;
an electrode-finger pitch between the k-th reflecting-electrode finger and a (k+1)-th reflecting-electrode finger is defined as a k-th electrode-finger pitch; and
a value of electrode-finger pitches from a first electrode-finger pitch to the k-th electrode-finger pitch is less than a value of electrode-finger pitches from the (k+1)-th electrode-finger pitch to an n-th electrode-finger pitch.