US 12,155,369 B2
Resonator and resonance device for vibrating in a contour vibration mode
Toshio Nishimura, Nagaokakyo (JP); and Ville Kaajakari, Helsinki (FI)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Sep. 17, 2021, as Appl. No. 17/478,437.
Application 17/478,437 is a continuation of application No. PCT/JP2019/048616, filed on Dec. 12, 2019.
Claims priority of provisional application 62/836,299, filed on Apr. 19, 2019.
Prior Publication US 2022/0006442 A1, Jan. 6, 2022
Int. Cl. H03H 9/24 (2006.01); H03H 9/17 (2006.01); H03H 3/013 (2006.01)
CPC H03H 9/24 (2013.01) [H03H 9/171 (2013.01); H03H 3/013 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A resonator comprising:
a vibration member that includes a substrate, a first electrode disposed on a first main surface of the substrate, and a piezoelectric layer disposed between the substrate and the first electrode, with the vibration member configured to vibrate with a main vibration being a contour vibration;
a frame that surrounds at least a portion of the vibration member; and
a support member that connects the vibration member to the frame,
wherein the vibration member includes a depressed portion on or above the first main surface of the substrate where the piezoelectric layer is removed.