US 12,155,178 B2
VCSEL with double oxide apertures
Hanxing Shi, Sunnyvale, CA (US); Richa Dubey, Sunnyvale, CA (US); Deepa Gazula, Sunnyvale, CA (US); Chris Kocot, Sunnyvale, CA (US); and Charles B. Roxlo, Sunnyvale, CA (US)
Assigned to II-VI DELAWARE, INC., Wilmington, DE (US)
Filed by II-VI Delaware, Inc., Wilmington, DE (US)
Filed on Dec. 6, 2022, as Appl. No. 18/062,123.
Application 18/062,123 is a continuation of application No. 16/992,936, filed on Aug. 13, 2020, granted, now 11,552,450.
Claims priority of provisional application 62/886,630, filed on Aug. 14, 2019.
Prior Publication US 2023/0116197 A1, Apr. 13, 2023
Int. Cl. H01S 5/183 (2006.01); H01S 5/40 (2006.01); H01S 5/343 (2006.01)
CPC H01S 5/18313 (2013.01) [H01S 5/18311 (2013.01); H01S 5/18333 (2013.01); H01S 5/18344 (2013.01); H01S 5/18361 (2013.01); H01S 5/4081 (2013.01); H01S 5/3432 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A vertical cavity surface emitting laser (VCSEL) comprising:
an active region configured to produce light at a wavelength;
a first oxide region having a first thickness and spaced apart from the active region by a distance of at least one-half of the wavelength, wherein the first oxide region is located at a second node of a standing wave counted as extending away from the active region;
a top mirror formed over the first oxide region, wherein the first oxide region being between the active region and the top mirror; and
a second oxide region having a second thickness and disposed adjacent to the first oxide region, wherein the first oxide region is between the active region and the second oxide region,
wherein the light has a divergence angle based upon the first thickness of the first oxide region and the second thickness of the second oxide region.