US 12,154,966 B2
Semiconductor device that includes a conductive member and an electrode and method for manufacturing the same
Hiroshi Ono, Setagaya (JP); Yosuke Kajiwara, Yokohama (JP); and Masahiko Kuraguchi, Yokohama (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Nov. 10, 2021, as Appl. No. 17/454,306.
Claims priority of application No. 2021-068885 (JP), filed on Apr. 15, 2021.
Prior Publication US 2022/0336630 A1, Oct. 20, 2022
Int. Cl. H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 29/43 (2006.01); H01L 29/66 (2006.01)
CPC H01L 29/66431 (2013.01) [H01L 29/2003 (2013.01); H01L 29/432 (2013.01); H01L 29/778 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a semiconductor member including a first partial region, a second partial region, and a third partial region, a position of the first partial region in a first direction from the second partial region toward the third partial region being between a position of the second partial region in the first direction and a position of the third partial region in the first direction;
a first conductive member including a first conductive portion, the first conductive portion being between the second partial region and the third partial region in the first direction, a direction from the first partial region toward the first conductive portion being along a second direction crossing the first direction;
a first electrode electrically connected to the first conductive member, the first electrode including a first electrode portion, a second electrode portion, and a third electrode portion, the first electrode portion being between the first partial region and the first conductive portion in the second direction, the second electrode portion being between the second partial region and the first conductive portion in the first direction, the third electrode portion being between the first conductive portion and the third partial region in the first direction;
a first insulating member, the first insulating member including a first insulating region, a second insulating region, and a third insulating region, the first insulating region being between the first partial region and the first electrode portion in the second direction, the second insulating region being between the second partial region and the second electrode portion in the first direction, the third insulating region being between the third electrode portion and the third partial region in the first direction; and
a second insulating member, the second insulating member including a first insulating portion and a second insulating portion, the first insulating portion being between the second electrode portion and the first conductive portion in the first direction, the second insulating portion being between the first conductive portion and the third electrode portion in the first direction.