US 12,154,873 B2
Semiconductor package including antenna
Yongkoon Lee, Suwon-si (KR); Jingu Kim, Suwon-si (KR); Sangkyu Lee, Suwon-si (KR); and Seokkyu Choi, Cheonan-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Mar. 24, 2023, as Appl. No. 18/125,989.
Application 18/125,989 is a continuation of application No. 17/206,252, filed on Mar. 19, 2021, granted, now 11,637,079.
Claims priority of application No. 10-2020-0102714 (KR), filed on Aug. 14, 2020.
Prior Publication US 2023/0230943 A1, Jul. 20, 2023
Int. Cl. H01L 23/66 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/538 (2006.01); H01Q 9/04 (2006.01); H01Q 19/00 (2006.01)
CPC H01L 23/66 (2013.01) [H01L 21/4853 (2013.01); H01L 21/4857 (2013.01); H01L 21/565 (2013.01); H01L 21/568 (2013.01); H01L 21/6835 (2013.01); H01L 23/3121 (2013.01); H01L 23/5383 (2013.01); H01L 23/5386 (2013.01); H01L 23/5389 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01Q 9/0407 (2013.01); H01Q 19/005 (2013.01); H01L 2221/68372 (2013.01); H01L 2223/6677 (2013.01); H01L 2224/214 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a semiconductor package, the method comprising:
forming a structure including a frame, a semiconductor chip, and a dielectric filling member, the frame including a conductive material and having a mounting space and a plurality of through holes, the semiconductor chip located in the mounting space, and the dielectric filling member filling the mounting space and the plurality of through holes and covering a top surface of the frame;
forming a supporting wiring structure under the structure, the supporting wiring structure including a first redistribution dielectric layer and a first redistribution conductive structure, the first redistribution conductive structure being electrically connected to the semiconductor chip;
forming a plurality of connection structures through the dielectric filling member, the plurality of connection structures extending in the plurality of through holes, electrically connecting the first redistribution conductive structure, and including a material having a higher electrical conductivity than the conductive material of the frame;
forming a cover wiring structure on the structure, the cover wiring structure including a second redistribution dielectric layer and a second redistribution conductive structure; and
attaching an antenna structure including a base board layer and an antenna conductive structure to the cover wiring structure.