US 12,154,771 B2
Chamber for an ionization vacuum gauge
Urs Wälchli, Chur (CH); Stefan Kaiser, Ruggell (LI); Bernhard Andreaus, Rapperswil (CH); Martin Wüest, Malans (CH); Astrid Waldner, Bad Ragaz (CH); and Michael Trefzer, Ruggell (LI)
Assigned to INFICON AG, Balzers (LI)
Filed by INFICON AG, Balzers (LI)
Filed on Feb. 2, 2024, as Appl. No. 18/431,091.
Application 18/431,091 is a continuation of application No. PCT/EP2023/071914, filed on Aug. 8, 2023.
Claims priority of application No. 000935/2022 (CH), filed on Aug. 8, 2022.
Prior Publication US 2024/0194465 A1, Jun. 13, 2024
Int. Cl. H01J 41/10 (2006.01); G01L 21/30 (2006.01); H01J 41/02 (2006.01)
CPC H01J 41/10 (2013.01) [G01L 21/30 (2013.01); H01J 41/02 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises:
an electrically conductive casing element (1, 1′, 1″) located radially on outside relative to a central axis (A);
electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element,
wherein at least one of the electrically conductive wall elements has a first opening (3), through which the central axis (A) extends wherein the electrically conductive casing element comprises at least a first (B1) and a second region (B2),
wherein the first region is located closer to the central axis than the second region, and
wherein a cross-section through the electrically conductive casing element has a shape of a polygon in a plane perpendicular to the central axis.