a pre-emission state detector configured to detect a pre-emission charged state which is a charged state of a charged object before the charged particles are emitted;

a learned model configured to receive a charged state of a charged object and a control parameter related to a control amount used for control of the charged particles to be emitted to the charged object to generate an estimated charged state which is a charged state of the charged object after the charged particles are controlled under the control parameter and emitted;

an estimated charged state generator configured to input the pre-emission charged state and a plurality of control parameters to the learned model to generate a plurality of estimated charged states corresponding to the pre-emission charged state and the plurality of control parameters;

selection processor circuitry configured to select an estimated charged state closest to a target charged state from the plurality of estimated charged states; and

emission processor circuitry configured to control the charged particles based on the control parameters corresponding to the selected estimated charged state to emit the charged particles to the charged object.