US 12,154,750 B2
Systems, devices, and methods for ion beam modulation
Vladislav Vekselman, Lake Forest, CA (US); Alexander Dunaevsky, Corona, CA (US); and Andrey A. Korepanov, Foothill Ranch, CA (US)
Assigned to TAE TECHNOLOGIES, INC., Foothill Ranch, CA (US)
Filed by TAE TECHNOLOGIES, INC., Foothill Ranch, CA (US)
Filed on Jun. 23, 2021, as Appl. No. 17/356,171.
Claims priority of provisional application 63/044,314, filed on Jun. 25, 2020.
Prior Publication US 2022/0084774 A1, Mar. 17, 2022
Int. Cl. H05H 5/06 (2006.01); H01J 27/02 (2006.01)
CPC H01J 27/028 (2013.01) [H01J 27/022 (2013.01); H05H 5/063 (2013.01); H01J 2237/06375 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An ion beam source system, comprising:
a tandem accelerator system downstream of an ion source and comprising a plurality of capacitors;
the ion source, wherein the ion source is configured to provide a negative ion beam to the tandem accelerator system downstream; and
a modulator system connected to an extraction electrode of the ion source, wherein the modulator system is configured to:
bias the extraction electrode until steady state ion extraction and acceleration voltage stability of the tandem accelerator system is achieved; and
discontinue biasing the extraction electrode when a measured voltage across two or more of the plurality of capacitors of the tandem accelerator system is reduced below a threshold.