CPC H01J 27/028 (2013.01) [H01J 27/022 (2013.01); H05H 5/063 (2013.01); H01J 2237/06375 (2013.01)] | 20 Claims |
1. An ion beam source system, comprising:
a tandem accelerator system downstream of an ion source and comprising a plurality of capacitors;
the ion source, wherein the ion source is configured to provide a negative ion beam to the tandem accelerator system downstream; and
a modulator system connected to an extraction electrode of the ion source, wherein the modulator system is configured to:
bias the extraction electrode until steady state ion extraction and acceleration voltage stability of the tandem accelerator system is achieved; and
discontinue biasing the extraction electrode when a measured voltage across two or more of the plurality of capacitors of the tandem accelerator system is reduced below a threshold.
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