US 12,154,648 B2
Semiconductor device, semiconductor memory device, and manufacturing method of semiconductor device
Yoshiyuki Takasu, Yokohama (JP); and Fumiharu Nakajima, Yokohama (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Sep. 13, 2022, as Appl. No. 17/931,604.
Claims priority of application No. 2022-048592 (JP), filed on Mar. 24, 2022.
Prior Publication US 2023/0307010 A1, Sep. 28, 2023
Int. Cl. H01L 23/528 (2006.01); G11C 5/02 (2006.01); G11C 16/08 (2006.01)
CPC G11C 5/025 (2013.01) [G11C 16/08 (2013.01); H01L 23/5283 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a first conductor including a first portion and a first pad portion, the first portion extending in a first direction, the first pad portion including a portion extending from an end portion of the first portion in a second direction that intersects the first direction;
a second conductor including a second portion, a third portion and a second pad portion and provided away from the first conductor, the second portion extending in the first direction, the third portion extending in the second direction from an end portion of the second portion, the second pad portion including a portion extending from an end portion of the third portion in the first direction;
a first insulator adjacent to the second pad portion in the first direction;
a first contact coupled to the first pad portion; and
a second contact coupled to the second pad portion, wherein
the first pad portion includes a first sub portion and a second sub portion adjacent to each other in the first direction, each of the first sub portion and the second sub portion includes one end portion and another end portion of the first pad portion, as viewed in the second direction, the first sub portion is adjacent to the second pad portion in the second direction, the second sub portion is adjacent to the first insulator in the second direction, and
a length of the second sub portion of the first pad portion, as viewed along the second direction, is less than a length of the first sub portion of the first pad portion, as viewed along the second direction.