| CPC G02B 6/12004 (2013.01) [G02B 6/1228 (2013.01); G02B 2006/12061 (2013.01)] | 20 Claims |
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1. A method of manufacturing an optical device, comprising:
providing a substrate including an oxide layer, a waveguide on the oxide layer and configured to guide light, and a taper on the oxide layer and optically coupled with the waveguide;
forming an attenuator extending along a side of the taper, wherein the formation of the attenuator includes:
forming a semiconductive member on the oxide layer and along the side of the taper;
forming a plurality of conductive vias over the semiconductive member;
forming a metal layer over the plurality of conductive vias and along the side of the taper; and
forming a dielectric layer to surround the waveguide, the taper and the attenuator,
wherein each of the plurality of conductive vias is disposed between and in contact with the metal layer and the semiconductive member.
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