CPC G01N 27/64 (2013.01) [G01N 1/14 (2013.01); G01N 27/227 (2013.01); G01N 27/27 (2013.01); H01L 21/67253 (2013.01)] | 20 Claims |
1. A detection device comprising:
a transfer device for traveling along a rail and gripping a carrier; and
a detection structure mounted on the carrier,
wherein the detection structure includes
a collector to suck in air,
a detector connected to the collector, the detector including a plurality of sensors,
a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and
a communication control board connected to the plurality of sensor control boards.
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